Evaluation of thin film noise suppressor applied to noise emulator chip implemented in 65 nm CMOS technology

Sho Muroga, Yasushi Endo, Wataru Kodate, Yoshiaki Sasaki, Kumpei Yoshikawa, Yuta Sasaki, Makoto Nagata, Masahiro Yamaguchi

研究成果: Article査読

9 被引用数 (Scopus)

抄録

This paper reports the shielding effect of soft magnetic film as a thin film noise suppressor applied to a test chip implemented in 65 nm seven metal CMOS technology. This test chip is equipped with a noise generator circuit. The 0.2-1-μm-thick magnetic films, which are integrated with polyimide substrates, are mounted onto the noise generator circuit in the test chip, and 2-μm-thick magnetic film is directly integrated to the passivation of the test chip. These films are deposited by RF magnetron spattering. The shield effect is evaluated by magnetic near-field measurement using planar shielded loop probe and 3-D full-wave electromagnetic field simulation. As a result, we successfully demonstrate a shield effect of 7.7 dB at a crock frequency of 200 MHz with 2-μ m-thick CoZrNb film. Furthermore, the result of the thickness dependence of the shielding effect revealed that a permeability-thickness product (μr × tm) of 1 950 μ m is required as the design target for obtaining 10 dB suppression.

本文言語English
論文番号6028098
ページ(範囲)4485-4488
ページ数4
ジャーナルIEEE Transactions on Magnetics
47
10
DOI
出版ステータスPublished - 2011 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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