Evaluation of thermal decomposition characteristics of active specialty gases on various metal surfaces using FT-IR method

Yasuyuki Shirai, Seok kiu Lee, Shinji Miyoshi, Tadahiro Ohmi

研究成果: Conference article査読

10 被引用数 (Scopus)

抄録

It is said that the metal surface has more catalytic effect as it becomes clean. In this work, we have evaluated the thermal decomposition characteristics of active specialty gases on several metal surfaces in order to find out the best surface for delivering precisely using FT-IR for in-situ measurement in gaseous phase. It was found that the thermal decomposition characteristics of active specialty gas was extremely different due to metal surface. Especially, the PH3 gas decomposed from room temperature on Ni surface. As a result, we confirmed a perfect Cr2O3 passive surface which we had already developed have good properties for active specialty gas distribution system.

本文言語English
ページ(範囲)17-21
ページ数5
ジャーナルInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
出版ステータスPublished - 1995 12月 1
イベントProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
継続期間: 1995 4月 301995 5月 5

ASJC Scopus subject areas

  • 環境工学

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