Evaluation of thermal decomposition characteristics of active specialty gases on various metal surfaces using FT-IR method

It is said that the metal surface has more catalytic effect as it becomes clean. In this work, we have evaluated the thermal decomposition characteristics of active specialty gases on several metal surfaces in order to find out the best surface for delivering precisely using FT-IR for in-situ measurement in gaseous phase. It was found that the thermal decomposition characteristics of active specialty gas was extremely different due to metal surface. Especially, the PH₃ gas decomposed from room temperature on Ni surface. As a result, we confirmed a perfect Cr₂O₃ passive surface which we had already developed have good properties for active specialty gas distribution system.