Evaluation of the elastic properties of a cantilever using resonant frequencies

Shizuka Nakano, Ryutaro Maeda, Kazushi Yamanaka

研究成果: Review article査読

15 被引用数 (Scopus)

抄録

A method to evaluate Young's modulus and Poison's ratio of a micro-cantilever is demonstrated using resonant frequency measurements of deflection and torsional vibrations. Both vibrations of the cantilever were exited by a new cantilever holder, and they were measured separately using an optical lever. Five modes of resonant frequencies for deflection and three modes for torsion were obtained. Young's modulus and Poison's ratio were estimated by fitting the theoretically calculated resonant frequencies to the experimental results.

本文言語English
ページ(範囲)3265-3266
ページ数2
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
5 SUPPL. B
出版ステータスPublished - 1997 5 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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