Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application

Klaus Vogel, Maik Wiemer, Thomas Gessner, Juergen Vogel, Yu Ching Lin, Yao Chuan Tsai, Masayoshi Esashi, Takashiro Tsukamoto, Shuji Tanaka

研究成果: Conference contribution

抄録

The thin film metallic glass Pd76Cu6Si18 exhibits unique material properties. Its utilization in MEMS devices requires the evaluation of both process compatibility as well as mechanical properties. This paper focuses on the fabrication of suitable test structures for the measurement of the Young's modulus and layer stress depending on the sputter conditions and corresponding composition. The layer properties can be adjusted to meet the requirements by tuning deposition parameters such as the chamber pressure.

本文言語English
ホスト出版物のタイトルSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems
ホスト出版物のサブタイトルMEMS, NEMS, ICs and Electronic Components, SSI 2015
出版社Apprimus Verlag
ページ240-247
ページ数8
ISBN(電子版)9783863592967
出版ステータスPublished - 2015 1 1
イベントSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015 - Copenhagen, Denmark
継続期間: 2015 3 112015 3 12

出版物シリーズ

名前Smart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015

Other

OtherSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015
国/地域Denmark
CityCopenhagen
Period15/3/1115/3/12

ASJC Scopus subject areas

  • コンピュータ サイエンスの応用
  • コンピュータ ネットワークおよび通信
  • 人工知能

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