Evaluation of Scanning Micromirror with Acoustic Cavity

Takashi Sasaki, Takuya Kanesawa, Kazuhiro Hane

研究成果: Conference contribution

抜粋

The effect of the acoustic cavity for scanning micromirror have been evaluated. The dimension of mirror is 2.8 mm square and the resonant frequency is about 19.5 kHz. The rotational amplitude of the mirror was periodically changed depending on the length of the cavity set below mirror. The amplitude was increased by 38 % compared with minimum state of the amplitude.

元の言語English
ホスト出版物のタイトルInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
出版者IEEE Computer Society
ISBN(印刷物)9781509063727
DOI
出版物ステータスPublished - 2018 9 4
イベント23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
継続期間: 2018 7 292018 8 2

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
2018-July
ISSN(印刷物)2160-5033
ISSN(電子版)2160-5041

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Switzerland
Lausanne
期間18/7/2918/8/2

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • これを引用

    Sasaki, T., Kanesawa, T., & Hane, K. (2018). Evaluation of Scanning Micromirror with Acoustic Cavity. : International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [8454523] (International Conference on Optical MEMS and Nanophotonics; 巻数 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454523