抄録
Hydrogen leak detection sensors must have high sensitivity and a short response time of 1 s or less. A ball surface-acousticwave (SAW) hydrogen sensor has a high sensitivity and can detect hydrogen in a very wide concentration range of lOppm to 100%. Moreover, a fast response can be expected because of the very thin sensitive film used. In this study, we developed a digital quadrature detector (DQD) to measure responses of less than 1 s, and measure phases in 1 ms intervals with excellent sensitivity. We evaluated the response time of the ball SAW hydrogen sensor where the signal was averaged 256 times in 0.256 s using the DQD. As a result, the response time was found to be Is or less for 3.0 vol % hydrogen gas in nitrogen.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 4726-4728 |
| ページ数 | 3 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 46 |
| 号 | 7 B |
| DOI | |
| 出版ステータス | Published - 2007 7 26 |
ASJC Scopus subject areas
- 工学（全般）
- 物理学および天文学（全般）