Evaluation of electrical properties in W-DLC coating for strain sensor applications

Takeshi Ohno, Takanori Takeno, Hiroyuki Miki, Tosiyuki Takagi

研究成果: Article査読

1 被引用数 (Scopus)

抄録

W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.

本文言語English
ページ(範囲)267-274
ページ数8
ジャーナルNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
76
762
DOI
出版ステータスPublished - 2010 2月

ASJC Scopus subject areas

  • 材料力学
  • 機械工学
  • 産業および生産工学

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