W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.
|ジャーナル||Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版ステータス||Published - 2010 2|
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering