A spherical aberration constant of the objective lens of a high-voltage electron microscope at Tohoku University (JEM-ARM1250) was evaluated by processing high-resolution electron microscope (HREM) images of an amorphous Ge thin film. The processing was carried out through a computer network system coupled with a highly efficient film scanner. From the intensity profiles of digital diffractograms of two HREM images, the spherical aberration constant of the objective lens (Cs) is estimated to be Cs = 1.74±0.10 mm and their defocus values are estimated to be about +77 nm and +118 nm, respectively.
|ジャーナル||Journal of Electron Microscopy|
|出版ステータス||Published - 1996|
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