Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate

Shoji Kamiya, Hironori Takahashi, Masumi Saka, Hiroyuki Abé

研究成果: Article査読

4 被引用数 (Scopus)

抄録

CVD diamond particles were produced on silicon substrates under various conditions such as different methane concentration in the source gas mixture and the substrate temperature, and their adhesive fracture toughness was evaluated. We confirmed that the adequate control of methane concentration could improve the toughness almost five times as large. The discussion is focused on the composition of different phases of carbon in the particles. The graphite content in the diamond particle seems to closely relate to the enhancement of adhesive fracture toughness. Detailed microscopic observations are also carried out about the fracture morphology along the interface and about the cross-sections of the diamond particles. The nanoscale crystal structure of diamond particles is also found to play an important role on the adhesive fracture toughness.

本文言語English
ページ(範囲)763-767
ページ数5
ジャーナルAmerican Society of Mechanical Engineers, EEP
26 3
出版ステータスPublished - 1999

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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