Etch rate dependence on crystal orientation for lithium niobate

Andrew B. Randles, Shuji Tanaka, Masayoshi Esashi

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

This paper presents experimental data for the etch rate of lithium niobate (LiNbO3) as a function of crystal orientation. The etching characterization is a fundamental technology needed for the fabrication of new sensors, actuators or other new devices. In this study, 30 mm spheres of LiNbO3 were etched in hydrofluoric acid and in a solution of hydrofluoric and nitric acids, to determine the etch rate dependence on crystal orientation. It was found that the maximum etch rate was on the -Z face and the etching showed a three-fold symmetry about the Z axis. The Wulff-Jaccodine method as well as the data collected from the etched spheres were used to predict the etched shape of a wafer. The predicted shape agreed with that found during etching.

本文言語English
ホスト出版物のタイトル2007 IEEE Ultrasonics Symposium Proceedings, IUS
ページ2119-2122
ページ数4
DOI
出版ステータスPublished - 2007 12 1
イベント2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
継続期間: 2007 10 282007 10 31

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷版)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
国/地域United States
CityNew York, NY
Period07/10/2807/10/31

ASJC Scopus subject areas

  • 音響学および超音波学

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