Erratum: Study of demolding characteristics in step and repeat ultra violet nanoimprinting (Japanese Journal of Applied Physics (2013) 52 (06GJ04))

Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, Shinji Matsui

研究成果: Comment/debate査読

本文言語English
論文番号089201
ジャーナルJapanese journal of applied physics
52
8
DOI
出版ステータスPublished - 2013 8

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

引用スタイル