Erbium-silicon-oxide nano-crystallite waveguide formation based on nano-porous silicon

T. Kimura, K. Ueda, R. Saito, K. Masaki, H. Isshiki

研究成果: Article査読

6 被引用数 (Scopus)

抄録

A new method is shown of the formation of a waveguide structure composed of erbium-silicon-oxide (Er-Si-O) nano-crystallites based on nano-porous silicon. A porous silicon (PS) double layered (core and clad) waveguide structure with a cross-section of semicircular shape was first formed by spatially selective anodic etching of an n-Si wafer in the dark. The core and clad PS layers consist is of different nanometer pore sizes. Next, Er ions were incorporated into pores by immersing the PS layers in an erbium-chloride/ethanol solution for 24 h. After drying, a two-step annealing was carried out to convert the Er-incorporated PS layers into Er-Si-O crystallites. The resulting samples showed a finely structured photoluminescence spectrum due to the 4f-4f inner shell transition of Er3+ ions at room temperature which was characteristic of Er-Si-O crystallites.

本文言語English
ページ(範囲)880-883
ページ数4
ジャーナルOptical Materials
27
5
DOI
出版ステータスPublished - 2005 2月
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • コンピュータ サイエンス(全般)
  • 原子分子物理学および光学
  • 分光学
  • 物理化学および理論化学
  • 有機化学
  • 無機化学
  • 電子工学および電気工学

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