Equivalent circuit analysis of RF-integrated inductors with/without ferromagnetic material

Masahiro Yamaguchi, Yoshisato Yokoyama, Yokoyama Ikeda, Takashi Kuribara, Kazuya Masu, Ken Ichi Arai

研究成果: Article査読

13 被引用数 (Scopus)


In this paper, the detailed procedure to extract π-type equivalent circuit parameters of RF-integrated spiral inductors with/without ferromagnetic material is presented. RF-integrated spiral inductors have been fabricated and the Tohoku University group (TU) and The Tokyo Institute of Technology group (TIT) separately acquired equivalent circuit parameters of an air-core spiral. The S-parameters were measured to extract the equivalent circuit parameters. The extracted parameters were perfectly identical. Extended 3D EM simulation clarified the effectiveness of ferromagnetic materials up to 5 GHz as well as the wave shortening effect by the permittivity of Si beyond the 10 GHz range. The 3D-EM-simulated parameters conformed to the extracted parameters in the low frequency range.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
4 B
出版ステータスPublished - 2003 4月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)


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