Enhanced coercive force of Nd-Fe-B thin films by the introduction of a Cr underlayer

T. Shima, A. Kamegawa, H. Fujimori

研究成果: Article査読

8 被引用数 (Scopus)


We investigated the influence of a Cr underlayer on the structure and magnetic properties of Nd-Fe-B thin films which were produced by a conventional rf sputtering method. The thickness of the underlayer and the substrate temperature were varied from 0 to 5000 Å and from room temperature to 670°C, respectively. It was found that the thickness of the underlayer material and the substrate temperature strongly influenced the crystal orientation and magnetic properties. The main crystalline phase was Nd2Fe14B, whose tetragonal c-axis was aligned perpendicularly to the film plane. A high coercive force (Hc=3.7 kOe) was achieved using the following conditions: Cr underlayer with a thickness of 500 A and a substrate temperature of 650°C. From TEM observation, this enhanced coercive force is thought to be attributable to a modification of the columnar structure.

ジャーナルJournal of Alloys and Compounds
出版ステータスPublished - 1998 11 20

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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