A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.
|出版ステータス||Published - 1997 1月 1|
|イベント||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA|
継続期間: 1997 6月 16 → 1997 6月 19
|Other||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)|
|City||Chicago, IL, USA|
|Period||97/6/16 → 97/6/19|
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