Enhanced chromatographic performance of silicon-micromachined capillary column with clean structure and interactive plasma organic films

Shinsuke Hannoe, Iwao Sugimoto, Keiichi Yanagisawa, Hiroki Kuwano

研究成果: Paper査読

16 被引用数 (Scopus)

抄録

A clean and small dead-space-micro-column was fabricated by silicon isotropic wet etching and ultrasonic machining. The micro-column which was formed on silicon substrate was 100 μm in width, 10 μm in depth, and 2.0 m in length. It has a very smooth surface which was formed by isotropic wet etching using a mixture of hydrofluoric, nitric, and acetic acid. To achieve connection to the detector and injection system, a new ultrasonic machining technique was used. Stationary phase of this micro-column was made from a sputtered fluoropolymer film for enhancing separation. This micro-column demonstrates enhanced chromatographic performance for methane gas analysis.

本文言語English
ページ515-518
ページ数4
出版ステータスPublished - 1997 1月 1
外部発表はい
イベントProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
継続期間: 1997 6月 161997 6月 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • 工学(全般)

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