Energy saving in semiconductor fabs by out-air handling unit performance improvement

Hirokazu Suzuki, Hideo Hanaoka, Yoshinori Ohkubo, Yoshio Yamazaki, Yasuyuki Shirai, Tadahiro Ohmi

研究成果: Conference article査読

10 被引用数 (Scopus)

抄録

This paper shows methods of energy saving. The energy consumed in semiconductor fabs is classified into two categories, the manufacturing system and the air conditioning. And the energy for the air conditioning is further classified into fresh air intake, recirculation (clean room) air conditioning and cooling system of the manufacturing system. Focused on the fresh air intake in summer, the moisture in the fresh air is condensed on a heat exchange-fin of the air-handling unit (AHU). This condensation decreases thermal exchange and increases intake-air resistance. Removal of it improves the performance. So we positively removed it, and 24% improvement of coefficient of heat exchange is achieved. Using this result, 5% of energy saving of the refrigerator is obtained. And the result is applied to all of the heating, ventilation, and air conditioning (HVAC) system, 3% energy saving is obtained.

本文言語English
ページ(範囲)293-296
ページ数4
ジャーナルIEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings
1
出版ステータスPublished - 2000
イベント9th International Symposium on Semiconductor Manufacturing - Tokyo, Japan
継続期間: 2000 9月 262000 9月 28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 工学(全般)
  • 産業および生産工学
  • 電子工学および電気工学

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