Energy dissipation in micron- and submicron-thick single crystal diamond mechanical resonators

Meiyong Liao, Masaya Toda, Liwen Sang, Shunichi Hishita, Shuji Tanaka, Yasuo Koide

研究成果: Article査読

19 被引用数 (Scopus)

抄録

The authors report the resonance frequency and the energy dissipation of single crystal diamond cantilevers with different dimensions, which were fabricated by ion implantation assisted technique. The resonance frequency well followed the inverse power law relationship with the length of the cantilevers and exhibited a high reproducibility with varying the dimensions. The energy dissipation decreased with increasing the cantilever length and saturated or reduced at a certain value. For the shorter cantilevers, clamping loss governed the energy dissipation. As the cantilever length increased to a certain value, defects relaxation or surface effect became dominant. The possible origins for these energy dissipations were discussed.

本文言語English
論文番号251904
ジャーナルApplied Physics Letters
105
25
DOI
出版ステータスPublished - 2014 12月 22

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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