@article{11921cb999454044bbfb92c45983bba0,
title = "Elimination of double position domains (DPDs) in epitaxial 〈111〉-3C-SiC on Si(111) by laser CVD",
abstract = " Elimination of double position domains (DPDs) in epitaxial 〈111〉-3C-SiC film on Si(111) substrate was conducted by laser chemical vapor deposition (LCVD) without carbonization. Transmission electron microscopy and pole figure were employed to investigate the microstructure and volume fraction of DPDs in the epitaxial layers, respectively. DPDs significantly decreased with decreasing deposition temperature (T dep ) and vanished at T dep = 1273 K. The mechanism of the elimination of DPDs by LCVD also has been discussed. ",
keywords = "3C-SiC, Elimination of double position domains (DPDs), Epitaxial growth, Laser CVD",
author = "Qingfang Xu and Peipei Zhu and Qingyun Sun and Rong Tu and Meijun Yang and Song Zhang and Lianmeng Zhang and Takashi Goto and Jiasheng Yan and Shusen Li",
note = "Funding Information: This work was supported by the National Natural Science Foundation of China (Nos. 51372188, and 51521001) and by the 111 Project (B13035). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090) and the Natural Science Foundation of Hubei Province, China (2016CFA006), and the Fundamental Research Funds for the Central Universities (WUT: 2017II43GX, 2017III032, 2017-YB-004). Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",
year = "2017",
month = dec,
day = "31",
doi = "10.1016/j.apsusc.2017.07.239",
language = "English",
volume = "426",
pages = "662--666",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
}