MEMS-based electrostatically levitated spherical 3-axis accelerometer has been developed. Fabrication of the spherical MEMS device is made possible by incorporating Ball Semiconductor technology and a novel sacrificial etching process utilizing xenon difluoride gas etching through gas permeable layer. 1-millimeter diameter spherical proof mass is completely suspended without any mechanical support by closed-loop controlled electrostatic forcers. 3-axis acceleration is derived from intensity of servo feedback between capacitive position sensing and the electrostatic actuation. Noise floor is estimated as 40μG/Hz1/2 level. After calibrating geometrical misalignment, scale factor and zero-G offset errors, linear output with minimal cross-axis error is obtained.
|ジャーナル||Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)|
|出版ステータス||Published - 2002|
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