Electrostatic servo system for multi-axis accelerometers

Keiji Jono, Masato Hashimoto, Masayoshi Esashi

研究成果: Conference contribution

9 被引用数 (Scopus)

抄録

A multi-axis capacitive accelerometer, using an electrostatic servo system was developed. In this system, an acceleration in three axes (X,Y,Z) is decomposed into its axial components independently and simultaneously by using the synchronous demodulation. The problem of off-axis response was solved by using the electrostatic force balancing to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

本文言語English
ホスト出版物のタイトルAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
出版社Publ by IEEE
ページ251-256
ページ数6
ISBN(印刷版)078031834X
出版ステータスPublished - 1994 1 1
イベントProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
継続期間: 1994 1 251994 1 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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