Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy

Chuan Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono

研究成果: Review article査読

13 被引用数 (Scopus)

抄録

In this study, we fabricated an electrostatic actuator probe having curved electrodes and evaluated its applicability for use in time-of-flight scanning force microscopy. In this probe, the end position of a cantilever with a tip is switched through electrostatic pull-in effect; the measurement modes can be changed between mass analysis and scanning force microscopy (SFM) modes. We achieved a large displacement of 400 μm for changing working modes. To prevent electrical shortage of the probe and curved electrodes, stoppers were formed along the curved electrodes. Because of the pull-in effect, the spring constant and resonance frequency increased through stiction of the cantilever to the stoppers. Using the fabricated probe, the SFM imaging of a sample featuring a 2-μm -pitch Au grid was demonstrated.

本文言語English
論文番号083702
ジャーナルReview of Scientific Instruments
81
8
DOI
出版ステータスPublished - 2010 8月

ASJC Scopus subject areas

  • 器械工学

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