Electron microscopy studies of microstructures in β-Ga2O3 single crystals

Encarnación G. Víllora, Yasukazu Murakami, Takasi Sugawara, Toshiyuki Atou, Masae Kikuchi, Daisuke Shindo, Tsuguo Fukuda

研究成果: Article査読

19 被引用数 (Scopus)

抄録

Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q204̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

本文言語English
ページ(範囲)769-774
ページ数6
ジャーナルMaterials Research Bulletin
37
4
DOI
出版ステータスPublished - 2002 3 25

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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