Electron Cyclotron Resonance Devices with Permanent Magnets for Production of Large-Diameter Uniform Plasmas

Satoru Iizuka, Noriyoshi Sato

研究成果: Article査読

17 被引用数 (Scopus)

抄録

A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.

本文言語English
ページ数1
ジャーナルJapanese journal of applied physics
33
7S
DOI
出版ステータスPublished - 1994 7

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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