Electrochemical behaviour of V-groove microelectrodes fabricated by micromachining

Mashio Shibuya, Tetsuya Hasegawa, Tomokazu Matsue, Isamu Uchida

研究成果: Article査読

2 被引用数 (Scopus)

抄録

The electrochemical behaviour of V-groove microelectrodes (10-100 μm wide) was investigated and compared with that of planar band microelectrodes with the same sizes. The V-groove electrodes were fabricated by anisotropic etching on a 〈100〉 silicon wafer in KOH solutions. The cyclic voltammetric investigation at the V-groove electrodes revealed a different scan rate dependence of the peak current from that at the planar band microelectrodes. When the V-groove electrode was covered with a platinum plate lid electrode, the redox cycling between the two electrodes proceeds efficiently, exhibiting higher collection efficiencies than at the ordinary interdigitated microarray electrode with the same size. The high collection efficiency originated from the small effective diffusion length.

本文言語English
ページ(範囲)535-540
ページ数6
ジャーナルJournal of Electroanalytical Chemistry
396
1-2
DOI
出版ステータスPublished - 1995 10 31

ASJC Scopus subject areas

  • 分析化学
  • 化学工学(全般)
  • 電気化学

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