Electrical properties and microstructure of low-temperature-crystallized lead zirconate titanate thin films prepared by 2.45 GHz microwave irradiation

Zhan Jie Wang, Yuka Otsuka, Zhiping Cao, Hiroyuki Kokawa

研究成果: Article査読

3 被引用数 (Scopus)

抄録

Lead zirconate titanate (PZT) thin films were coated on Pt/Ti/SiO 2/Si substrates by a sol-gel method and then crystallized at 490 °C using the magnetic field of 2.45 GHz microwave irradiation. The crystalline phases and microstructures as well as the electrical properties of the PZT thin films were investigated. X-ray diffraction analysis indicated that the films were crystallized well into the perovskite phase. Scanning electron microscopy showed that the PZT films had a typical rosette structure, which consisted of large round grains on a matrix of fine grains. A transmission electron microscopy (TEM) study revealed that the fine grains were also mainly crystallized into the perovskite phase. The average remanent polarization and coercive field of the PZT films were approximately 21 μC/cm2 and 92 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 510 and 0.07, respectively.

本文言語English
ジャーナルJapanese journal of applied physics
48
9 Part 2
DOI
出版ステータスPublished - 2009 12 1

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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