Electrical properties and microstructure of lead zirconate titanate (PZT) thin films deposited by pulsed-laser deposition

Zhan Jie Wang, Hiroyuki Kokawa, Ryutaro Maeda

研究成果: Conference article

9 引用 (Scopus)

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Pb(Zr0.52Ti0.48)O3 (PZT) thin films were prepared by pulsed-laser deposition (PLD) on Pt/Ti/SiO2/Si substrates and were crystallized by subsequent annealing at 750°C for 90min. Crystalline phases in the PZT films were investigated by X-ray diffraction (XRD) analysis. The microstructure and composition of the films were studied by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS), respectively. It is found that the films consist almost entirely of the perovskite phase, but a thin layer of the pyrochlore phase exists at the surface of the films. Electrical properties of these films were evaluated by measuring P-E hysteresis loops and dielectric constants, and the effect of the microstructure on the electrical properties of the PZT thin films is discussed.

元の言語English
ページ(範囲)1529-1533
ページ数5
ジャーナルCeramics International
30
発行部数7
DOI
出版物ステータスPublished - 2004 9 7
イベント3rd Asian Meeting on Electroceramics - Singapore, Singapore
継続期間: 2003 12 72003 12 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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