Electrical feedthrough for wafer level packaging and arrayed MEMS

Masayoshi Esashi

研究成果: Paper査読

本文言語English
出版ステータスPublished - 2007 1 1
イベントSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 - Paris, France
継続期間: 2007 3 272007 3 28

Conference

ConferenceSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
CountryFrance
CityParis
Period07/3/2707/3/28

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications

引用スタイル