Electrical conductivity of SrRuO3 thin films prepared by laser ablation

Akihiko Ito, Hiroshi Masumoto, Takashi Goto

研究成果: Conference article査読

2 被引用数 (Scopus)


SrRuO3 (SRO) thin films were prepared by laser ablation. The optimum preparation condition of highly electrically conductive SRO thin films was investigated. The substrate temperature (Tsub) was changed from room temperature to 973 K, and the deposition atmosphere was at a high vacuum (P = 10-6 Pa) and in O2 at oxygen pressures (Po2) of 0.13 and 13 Pa. The films deposited at P = 10-6 Pa and Po 2 = 0.13 Pa were amorphous structure. At Tsub > 573 K and Po2 = 13 Pa, well-crystallized pseudo-cubic SRO thin films with (110) orientation were obtained. With increasing Tsub, the conductivity of SRO films increased from 7.7×103 to 9.1×104 S·m-1. The epitaxially grown SRO films on (100) SrTiO3 substrates exhibited the highest conductivity of 1.8×105 S·m-1.

ジャーナルMaterials Science Forum
出版ステータスPublished - 2005 1 1
イベントPRICM 5: The Fifth Pacific Rim International Conference on Advanced Materials and Processing - Beijing, China
継続期間: 2004 11 22004 11 5

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


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