Elastic anisotropy and incohesive bond of chemical-vapor-deposition diamond film: Acoustic resonance measurements and micromechanics modeling

Nobutomo Nakamura, Hirotsugu Ogi, Tetsu Ichitsubo, Masahiko Hirao, Natsuo Tatsumi, Takahiro Imai, Hideaki Nakahata

研究成果: Article査読

14 被引用数 (Scopus)

抄録

The elastic anisotropy of chemical vapor deposition (CVD) polycrystalline diamond films was analyzed. Acoustic spectroscopy and micromechanics modeling were used to study elastic anisotropy in the diamond films. The CVD diamond films showed five independent elastic constants and exhibited elastic anisotropy between the in-plane direction and the film-growth direction. The results show that local incomplete cohesion was responsible for the small elastic constants and anisotropy of the film.

本文言語English
ページ(範囲)6405-6410
ページ数6
ジャーナルJournal of Applied Physics
94
10
DOI
出版ステータスPublished - 2003 11 15
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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