Eggshell- and fur-like microstructures of yttrium silicate film prepared by laser chemical vapor deposition

Akihiko Ito, Jun Endo, Teiichi Kimura, Takashi Goto

研究成果: Article査読

7 被引用数 (Scopus)

抄録

Yttrium silicate (Y-Si-O) films with eggshell- and fur-like microstructures were prepared by laser chemical vapor deposition using a Nd:YAG laser, and tetraethyl orthosilicate (TEOS) and yttrium dipivaloylmethane (Y(dpm) 3) precursors. Amorphous Y-Si-O films were prepared at deposition temperature below 1200 K. The crystalline Y-Si-O films with mixtures of Y 4.67(SiO4)3O and α-Y2Si 2O7 phases were obtained at deposition temperature above 1200 K. y-Y2Si2O7 and X1-Y2SiO 5 minor phases were also formed at a higher deposition temperature. At deposition temperature ranging between 1285 and 1355 K, a dome-like structure covered with fine fur-like projections was formed under a total pressure of 3.5 kPa, whereas an eggshell-like structure 200-300 μm in diameter and 10-20 μm in shell thickness was formed at 7.5 kPa. The deposition rate for the Y-Si-O films with fur- and eggshell-like microstructures reached 300 and 1000 μm h-1, respectively.

本文言語English
ページ(範囲)242-246
ページ数5
ジャーナルMaterials Chemistry and Physics
125
1-2
DOI
出版ステータスPublished - 2011 1 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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