Effects of surface phosphorus on the kinetics of hydrogen desorption from silane-adsorbed Si (100) surface at room temperatures

Chemistry

• Desorption 100%
• Surface 22%
• Hydrogen 16%
• Reaction Temperature 16%
• Chemical Kinetics Characteristics 11%
• Arrhenius Plot 5%
• Reaction Activation Energy 5%
• Reaction Order 5%
• Spectra 5%
• Ambient Reaction Temperature 5%

Physics

• Hydrogen 16%
• Temperature 16%
• Kinetics 11%
• Room Temperature 5%
• High Temperature 5%
• Increasing 5%
• Silane 5%
• Spectra 5%

Material Science

• Surface 22%