Effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process

Yasa Sampurno, Yun Zhuang, Xun Gu, Sian Theng, Takenao Nemoto, Ting Sun, Fransisca Sudargho, Akinobu Teramoto, Ara Philipossian, Tadahiro Ohmi

研究成果: Conference contribution

6 被引用数 (Scopus)

フィンガープリント 「Effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy