Effect of UV lamp irradiation during oxidation of Zr/Pt/Si structure on electrical properties of Pt/ZrO 2 /Pt/Si structure

Joon Woo Bae, Jae Won Lim, Kouji Mimura, Masahito Uchikoshi, Takamichi Miyazaki, Minoru Isshiki

研究成果: Article査読

1 被引用数 (Scopus)

フィンガープリント 「Effect of UV lamp irradiation during oxidation of Zr/Pt/Si structure on electrical properties of Pt/ZrO <sub>2</sub> /Pt/Si structure」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy