Effect of thermal annealing on electrical properties in MBE-grown n-type GaN films

Narihiko Maeda, Kazuhiko Nozawa, Yoshiro Hirayama, Naoki Kobayashi

研究成果: Article査読

4 被引用数 (Scopus)

抄録

We have examined the effects of thermal annealing on electrical properties in molecular beam epitaxy (MBE) grown n-type GaN films by using variable temperature Hall effect measurement. We have investigated both undoped and Si-doped samples, and have found that the electron mobility increases by thermal annealing along with an increase or decrease in the carrier concentration, which eventually leads to the decrease in resistivity. The observed changes in the mobility and the carrier concentration can be explained by the model whereby shallow donors and deep acceptors both are diminished by thermal annealing. Changes in donor and acceptor concentrations have been estimated based on Hall effect measurement data at low temperatures.

本文言語English
ページ(範囲)359-363
ページ数5
ジャーナルJournal of Crystal Growth
189-190
DOI
出版ステータスPublished - 1998 6 15
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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