Effect of substrate-surface orientation on the N incorporation in GaAsN films on GaAs grown by MOVPE

P. Klangtakai, S. Sanorpim, S. Kuboya, R. Katayama, K. Onabe

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

The GaAs1-xNx alloy semiconductor has been grown on GaAs (001), (111)A and (011) substrates by metalorganic vapor-phase epitaxy. High resolution X-ray diffraction and Raman scattering were employed to examine the effective N content and the growth rate, as a function of the substrate-surface orientation. The growth rate, which was assessed though the clear Pendellösung fringes, and the N content were found to change dramatically with the substrate-surface orientations. The N content was determined in the order (111)A > (001) > (011). While, the growth rate is in the order, (001) > (011) > (111)A. The effect of substrate-surface orientation on the N incorporation found in the present study is interpreted in terms of the difference in the growth rate on each surface orientation and the number of dangling bonds with which the N atoms can be trapped on the growing surface. Our results show that controlled nitrogen incorporating for GaAsN is successfully achieved and can be applied to the fabrication of some novel structures such as a spontaneous N content modulated structure, which is applicable to high performance long wavelength laser diodes.

本文言語English
ホスト出版物のタイトルSmart Materials - International Conference on Smart Materials Smart/Intelligent Materials and Nanotechnology, (Smartmat-'08) and the 2nd International Workshop on Functional Materials and Nanomaterial
出版社Trans Tech Publications
ページ825-828
ページ数4
ISBN(印刷版)0878493565, 9780878493562
DOI
出版ステータスPublished - 2008
イベントInternational Conference on Smart Materials-Smart/Intelligent Materials and Nano Technology, (SmartMat-'08) and 2nd International Workshop on Functional Materials and Nanomaterials (IWOFM-2) - Chiang Mai, Thailand
継続期間: 2008 4 222008 4 25

出版物シリーズ

名前Advanced Materials Research
55-57
ISSN(印刷版)1022-6680

Conference

ConferenceInternational Conference on Smart Materials-Smart/Intelligent Materials and Nano Technology, (SmartMat-'08) and 2nd International Workshop on Functional Materials and Nanomaterials (IWOFM-2)
CountryThailand
CityChiang Mai
Period08/4/2208/4/25

ASJC Scopus subject areas

  • Engineering(all)

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