Effect of precursor supply on (100) and (001) orientations of α-Al2O3 film prepared by laser CVD

Kadokura Hokuto, Akihiko Ito, Teiichi Kimura, Takashi Goto

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

α-Al2O3 films were prepared by laser chemical vapor deposition and the effects of precursor evaporation temperature (T vap) and oxygen gas flow rate (FRO) on phase and orientation of Al2O3 films were investigated. At T vap = 413 K, (100)-oriented α-Al2O3 and θ-Al2O3 were codeposited. The amount of θ-Al2O3 increased with increasing FRO. At Tvap = 433-443 K, α-Al2O3 films showed a (001) orientation. (100)- and (001)-oriented α-Al2O 3 films had a rectangular- and hexagonal-shaped grains, respectively, and showed a columnar in cross section. Grain size of (100)- and (001)-oriented α-Al2O3 films decreased from 10 to 2 μm with increasing FRO from 0.085 to 0.85 Pa m3 s-1. Deposition rate increased from 100 to 300 μm h-1 with increasing Tvap from 413 to 443 K.

本文言語English
ホスト出版物のタイトルMaterials Integration
出版社Trans Tech Publications Ltd
ページ3-6
ページ数4
ISBN(印刷版)9783037853764
DOI
出版ステータスPublished - 2012
イベントInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
継続期間: 2011 12 12011 12 2

出版物シリーズ

名前Key Engineering Materials
508
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
国/地域Japan
CitySendai
Period11/12/111/12/2

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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