Effect of Oxidation Process on Grain-Size Reduction for Longitudinal Media Using Ni-Based Amorphous Seedlayer

Masaki Mikami, D. D. Djayaprawira, S. Yoshimura, M. Takahashi

    研究成果: Article査読

    4 被引用数 (Scopus)

    抄録

    Oxidation process using Ni-based amorphous seedlayer (NiNb, NiTa, and NiZr) has been studied to control the grain size of longitudinal media fabricated on glass substrate. The mechanism of the grain-size reduction was investigated using an in situ Auger electron spectroscopy technique. It is found that NiNb seedlayer is the most effective to reduce the media grain size. This is suggested to be due to the lowest affinity for oxygen for Nb as compared with Ta or Zr. The reduction of the grain size (GDact) with using Ni-based seedlayer and oxygen process is inferred mainly due to uniform oxidation of the initial growth of the underlayer.

    本文言語English
    ページ(範囲)2258-2260
    ページ数3
    ジャーナルIEEE Transactions on Magnetics
    39
    5 II
    DOI
    出版ステータスPublished - 2003 9

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 電子工学および電気工学

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