Effect of NH3 atmosphere on preparation of Al2O 3-AlN composite film by laser CVD

Yu You, Akihiko Ito, Rong Tu, Takashi Goto

研究成果: Conference contribution

抄録

Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O 3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH 3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862-887 K), and AlN granular grains were embedded in between α-Al2O 3 polyhedral grains.

本文言語English
ホスト出版物のタイトルAdvanced Engineering Ceramics and Composites
出版社Trans Tech Publications Ltd
ページ172-176
ページ数5
ISBN(印刷版)9783037851814
DOI
出版ステータスPublished - 2011

出版物シリーズ

名前Key Engineering Materials
484
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

フィンガープリント

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