@inproceedings{d1442d39e88e4b928218b6c0f1d530f9,
title = "Effect of NH3 atmosphere on preparation of Al2O 3-AlN composite film by laser CVD",
abstract = "Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O 3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH 3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862-887 K), and AlN granular grains were embedded in between α-Al2O 3 polyhedral grains.",
keywords = "AlN, Composite film, Laser CVD",
author = "Yu You and Akihiko Ito and Rong Tu and Takashi Goto",
year = "2011",
doi = "10.4028/www.scientific.net/KEM.484.172",
language = "English",
isbn = "9783037851814",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "172--176",
booktitle = "Advanced Engineering Ceramics and Composites",
}