Effect of laser power on orientation and microstructure of Ba 2 TiO 4 film prepared by laser chemical vapor deposition

Dongyun Guo, Takashi Goto, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.

本文言語English
ページ(範囲)7860-7863
ページ数4
ジャーナルApplied Surface Science
258
20
DOI
出版ステータスPublished - 2012 8月 1

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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