Ba 2 TiO 4 films were prepared on Pt/Ti/SiO 2 /Si substrates by laser chemical vapor deposition method. The effect of laser power (P L ) on orientation and microstructure was investigated. With increasing P L from 52 to 93 W, the deposition temperature (T dep ) increased from 845 to 946 K. With increasing T dep from 845 to 927 K, the preferred orientation of Ba 2 TiO 4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba 2 TiO 4 film prepared at 881 K had high deposition rate (R dep ) of 51.4 μm h -1 , which was advantageous to industrial production.
ASJC Scopus subject areas
- 化学 (全般)