The optical tolerance of annealed LiCaAlF6 single crystals against F2 laser irradiation was investigated. Annealed LiCaAlF 6 (t = 1.45 mm) shows an improved transmittance at 157 nm, 94.4% after the compensation of the surface reflection loss. Furthermore, after the initial increase by F2 laser cleaning, transmittance at 157 nm remains almost unchanged even after irradiation with a F2 laser beam up to 105 pulses at a fluence of approximately 160 mJ cm-2 pulse-1.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2004 9 1|
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