Edge profile measurement of micro-cutting tools on a diamond turning machine

T. Asai, S. H. Jang, Y. Arai, I Ko

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Single crystal diamond micro-cutting tools, which are used for fabrication of precision micro-parts, have very sharp tool edges with radii in the range of tens of nanometers or even nanometers. Although there are many types of tools, the tools with a rounded nose are treated in this paper. They can be used for fabrication of very smooth and accurate surface with 3D micro structures such as micro-lens arrays, diffractive optical elements and so on. The machined quality is highly depending on the tool edges' states and it is desired to manage them. This paper presents a measuring instrument based on atomic force microscope (AFM), which is designed and constructed for on-machine measurement of the cutting edge profile. It is a combination of an AFM probe unit for 3D edge profile measurement and an alignment system with an optical sensor for aligning the probe-tip with the tool's edge top so that the measurement can be carried out in a short time. Measurement experiments of micro-tools with (nominal) nose radii of 8 μm and 0.2 mm are summarized to show the performance of the instrument. And the nose radii were evaluated as 7.2 μm and 0.188 mm, respectively.

本文言語English
ホスト出版物のタイトルSixth International Symposium on Precision Engineering Measurements and Instrumentation
7544
DOI
出版ステータスPublished - 2010 12 1
イベント6th International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China
継続期間: 2010 8 82010 8 11

Other

Other6th International Symposium on Precision Engineering Measurements and Instrumentation
国/地域China
CityHangzhou
Period10/8/810/8/11

ASJC Scopus subject areas

  • 応用数学
  • コンピュータ サイエンスの応用
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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