We proposed and demonstrated an electro-mechanically actuated optical metamaterial for dynamic spectral control of Fano resonance in the optical region. Dynamic modulation was achieved by the change in interaction among metamaterial unit cells on beam structures actuated by parallel plate type actuators. Fano resonance at wavelengths around 1300 nm was achieved by complementary asymmetric-double-bar structures based on Babinet’s principle. The MEMS actuated optical metamaterial showed 10% modulation of Fano resonant spectra. This result is the first demonstration of dynamic control of Fano resonance in electro-mechanically actuated metamaterials operating in the optical region. Since arbitrary metamaterial structures are applicable to the proposed device and fabrication is simple, the device will provide opportunities to realize dynamic spectral control of various kinds of metamaterials.
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