@inproceedings{cf76a734579c4862bb34e01867fac948,
title = "Driving of optical fiber by surface-micromachined cam-micromotor for the applications to variable optical attenuator",
abstract = "This paper discusses the fabrication of a novel variable optical attenuator (VOA). In this device, an optical fiber is directly driven by a cam-micromotor. The performance of the cam-micromotor and the coupling efficiency between two fibers are also examined.",
keywords = "Etching, Frequency, Helium, Mechatronics, Optical attenuators, Optical fibers, Optical surface waves, Stators, Voltage, Wavelength division multiplexing",
author = "Y. Kanamori and Y. Aoki and M. Sasaki and H. Hosoya and A. Wada and K. Hane",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/OMEMS.2003.1233495",
language = "English",
series = "2003 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "119--120",
booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",
note = "2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",
}