Dominance of Cl2+ or Cl+ ions in time-modulated inductively coupled Cl2 plasma investigated with laser-induced fluorescence technique and probe measurements

Shinya Kumagai, Minoru Sasaki, Mitsumasa Koyanagi, Kazuhiro Hane

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Relative densities of chlorine molecular ions Cl2+ and metastable chlorine atomic ions Cl+* were measured by a laser-induced fluorescence technique in cw and time-modulated inductively coupled chlorine plasma. In the discharge-off period of the time-modulated plasma, a considerable amount of Cl2+ persisted. Under the modulation frequency of 100 kHz, the decrease of the Cl2+ density in the discharge-off period was less than 30% and the decay time constant of Cl2+ density was longer than that of Cl+*. In order to investigate the dominance between Cl2+ and chlorine atomic ions Cl+, the relative densities of Cl2+ and Cl+* were calibrated as absolute densities along with the Langmuir probe measurements. The dominant ions in the cw plasma were Cl+, however, the Cl2+ density became comparable to the Cl+ density in the time-modulated plasma.

本文言語English
ページ(範囲)6980-6984
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
12 B
出版ステータスPublished - 2000 12 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

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