Distributed electrostatic micro actuator

Motoharu Yamaguchi, Shuji Kawamura, Kazuyuki Minami, Masayoshi Esashi

研究成果: Conference contribution

35 被引用数 (Scopus)


A new micro actuator driven by electrostatic force is described. We call it a distributed electrostatic actuator, because it consists of many driving units. Each driving unit has wave-like electrodes, which are insulated and pulled each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure and the external force. The motion of the actuator was analyzed with finite element method (FEM) and the macro model of the actuator was fabricated to verify its motion. In this actuator the apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving. It was confirmed that the apparent compliance can be changed by the feedback gain.

ホスト出版物のタイトルIEEE Micro Electro Mechanical Systems
出版社Publ by IEEE
出版ステータスPublished - 1993 1 1
イベントProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
継続期間: 1993 2 71993 2 10


名前IEEE Micro Electro Mechanical Systems


OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
CityFort Lauderdale, FL, USA

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学


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