Displacement measurement using grating images detected by CCD image sensor

K. Hane, C. P. Grover

研究成果: Conference article査読

抄録

Recently, the interference phenomenon known as grating imaging has been studied for some practical applications as well as for the theoretical interest. When the object grating, which is illuminated incoherently, is located in the vicinity of the transmission grating, the magnified image of the object grating is obtained at the image distances far from the gratings. Since the high magnification (approximately 102 to 103) can be obtained, the image displacement is very sensitive to that of the object. We propose here a displacement sensing technique using the grating images detected by CCD image sensor. The images are processed with a computer by using a spatial phase detection method. The lateral displacement and the distance separating the two gratings can be obtained simultaneously and separately. The proposed technique will be useful as a compact two dimentional displacement sensing method in opto-mechanical systems.

本文言語English
ページ(範囲)584-590
ページ数7
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
1332
pt 2
出版ステータスPublished - 1990 12月 1
外部発表はい
イベントOptical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - San Diego, CA, USA
継続期間: 1990 7月 81990 7月 13

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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