Dislocation dynamics in bending deformation of Si

Ichiro Yonenaga, Kazuo Nakajima

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Deformation characteristics in high-purity Si crystals subjected to bending tests were studied. Specimens were deformed at the temperatures higher than 800°C without brittle fracture under application of a high stress up to 350 MPa. Stress-strain behavior and the yield stresses depend on the temperature and the strain rate. The results were discussed in terms of the dislocation dynamics and dislocation mobility to provide fundamental knowledge for wafer manufacturing.

本文言語English
ホスト出版物のタイトルMaterials Integration
出版社Trans Tech Publications Ltd
ページ357-360
ページ数4
ISBN(印刷版)9783037853764
DOI
出版ステータスPublished - 2012
イベントInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
継続期間: 2011 12月 12011 12月 2

出版物シリーズ

名前Key Engineering Materials
508
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
国/地域Japan
CitySendai
Period11/12/111/12/2

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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