Dislocation behavior in highly impurity-doped Si

I. Yonenaga

研究成果: Article査読

1 被引用数 (Scopus)

抄録

The dynamic behavior of dislocations in highly impurity-doped Si crystals is investigated. Suppression of the generation of dislocations from a surface scratch is found for Si doped with B and P with a concentration higher than 1 × 1019 cm-3 and the critical stress for dislocation generation increases with B and P concentration which is interpreted in terms of dislocation locking due to impurity segregation. The velocity of dislocations in B- and P-doped crystals increases with increasing B and P concentration, respectively.

本文言語English
ページ(範囲)285-288
ページ数4
ジャーナルJournal of Materials Science: Materials in Electronics
12
4-6
DOI
出版ステータスPublished - 2001 4

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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