Direct writing of conductive silver micropatterns on flexible polyimide film by laser-induced pyrolysis of silver nanoparticle-dispersed film

Mohammod Aminuzzaman, Akira Watanabe, Tokuji Miyashita

研究成果: Article査読

51 被引用数 (Scopus)

抄録

This article describes fabrication of Ag micropatterns on a flexible polyimide (PI) film by laser direct writing using an Ag nanoparticle-dispersed film as a precursor. Ag micropatterns are characterized by optical microscopy, atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM), surface profilometry, and resistivity measurements. The line width of Ag micropatterns can be effectively controlled by altering the experimental parameters of laser direct writing especially laser intensity, objective lens, and laser beam scanning speed etc. Using an objective lens of 100× and laser intensity of 170.50 kW/cm2, Ag micropatterns with a line width of about 6 μm have been achieved. The Ag micropatterns show strong adhesion to polyimide surface as evaluated by Scotch-tape test. The resistivity of the Ag micropatterns is determined to be 4.1 × 10-6 Ω cm using two-point probe method. This value is comparable with the resistivity of bulk Ag (1.6 × 10-6 Ω cm).

本文言語English
ページ(範囲)931-938
ページ数8
ジャーナルJournal of Nanoparticle Research
12
3
DOI
出版ステータスPublished - 2010 3

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 化学 (全般)
  • 原子分子物理学および光学
  • モデリングとシミュレーション
  • 材料科学(全般)
  • 凝縮系物理学

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