A model of cluster growth process based on Direct Simulation Monte Carlo (DSMC) and first principle calculation is introduced to explore the effects of experimental conditions on the clustering process and size distribution of the clusters gathered at the nozzle. The behavior of material and inert gas atoms, which fly through the cluster formation equipment, is simulated under different experimental conditions including flight path length, concentration of the material gas to the inert gas, total gas pressure and the initial temperature of the inert gas. Size distributions of generated clusters under various conditions are obtained. The results of the present simulation suggest that the size distribution strongly depends on the experimental conditions.
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